history of

8th International Seminar
on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Brno, Czech Republic, July 8-12, 2002

LIST OF PARTICIPANTS
Dr. Pavel ADAMEC, Integrated Circuit Testing GmbH, Heimstetten, Germany
Dr. David ADLER, KLA-Tencor, San Jose, USA
Dr. Jim BARTH, Delft University of Technology, Delft, The Netherlands
Dr. Jaroslav CHMELÍK, FEI, Brno, Czech Republic
Mgr. Petr ČI®MÁR, Institute of Scientific Instruments, Brno, Czech Republic
Prof. Armin DELONG, Delong Instruments, Ltd., Brno, Czech Republic 
Mgr. David DVOŘÁK, Institute of Scientific Instruments, Brno, Czech Republic
Dipl. Phys. Mathias ESCHER, Focus GmbH, Hünstetten, Germany 
Dr. Luděk FRANK, Institute of Scientific Instruments, Brno, Czech Republic
Prof. Franz HASSELBACH, University of Tübingen, Germany
Dr. Peter HAWKES, CNRS Toulouse, France
Dr. Miroslav HORÁČEK, Institute of Scientific Instruments, Brno, Czech Republic
Dr. Josef JIRÁK, University of Technology, Brno, Czech Republic
Dr. Tadahiro KAWASAKI, Osaka University, Japan
Dr. Vladimír KOLAŘÍK, Delong Instruments, Ltd., Brno, Czech Republic
Ing. Karel KOLLARČÍK, FEI, Brno, Czech Republic
Dr. Anjam KURSHEED, University of Singapore
Dr. Bohumila LENCOVÁ, Institute of Scientific Instruments, Brno, Czech Republic
Dr. Filip LOPOUR, Tescan Ltd., Brno, Czech Republic
Dr. Marian MAŇKO©, KLA-Tencor, San Jose, USA
Dr. Gebhard MARX, IBM Research, Zürich, Switzerland
Dr. Harry MUNACK, Integrated Circuit Testing GmbH, Heimstetten, Germany
Dr. Eric MUNRO, MEBS Ltd, London, United Kingdom
Prof. Tom MULVEY, University of Aston, Birmingham, United Kingdom
Dr. Ilona MÜLLEROVÁ, Institute of Scientific Instruments, Brno, Czech Republic
Mgr. Martin MYNÁŘ, Delong Instruments, Ltd., Brno, Czech Republic
Ing. Vilém NEDĚLA, Institute of Scientific Instruments, Brno, Czech Republic
Mgr. Martin ORAL, Institute of Scientific Instruments, Brno, Czech Republic
Mgr. Tomáą RADLIČKA, Masaryk University, Brno, Czech Republic
Dipl. Phys. Michael RAUSCHER, University of Tübingen, Germany
Prof. Frank READ, University of Manchester, United Kingdom
Dr. Vladimír ROMANOVSKÝ, University of York, United Kingdom
Prof. Harald ROSE, Technical University, Darmstadt, Germany
Dr. Petr SCHAUER, Institute of Scientific Instruments, Brno, Czech Republic
Dipl. Phys. Stefan SCHUBERT, University of Tübingen, Germany
Ing. Luděk SCHNEIDER, University of Technology, Brno, Czech Republic
Prof. Gerd SCHÖNHENSE, University of Mainz, Germany
Mgr. Petr SKOČOVSKÝ, FEI, Brno, Czech Republic
Dipl. Phys. Peter SONNENTAG, University of Tübingen, Germany
Dr. Rainer SPEHR,  Technical University Darmstadt, Germany
Milan ©NÁBL, Integrated Circuit Testing GmbH, Heimstetten, Germany
Ing. Jiří ©PINKA, University of Technology, Brno, Czech Republic
Mgr. Petr ©TĚPÁN, Delong Instruments, Ltd., Brno, Czech Republic
Dr. Lubomír TŮMA, FEI, Brno, Czech Republic
Mgr. Marek UNČOVSKÝ, FEI, Brno, Czech Republic
Ing. Rogier van AKEN, Delft University of Technology, Delft, The Netherlands
Dipl. Phys. Hilmar WITTEL, University of Tübingen, Germany
Dr. Jitka ZOBAČOVÁ, Institute of Scientific Instruments, Brno, Czech Republic
SCHEDULE

Monday July 8


Arrival
19.00 Welcome party

Tuesday July 9


08.30 Breakfast
09.30 Seminar session
      Computations for electron optics I
      (moderated by E. Munro, F. Read)
11.00 Coffee break
11.30 Seminar session
      Computations for electron optics II
      (moderated by P. Hawkes, B. Lencová)
13.00 Lunch
14.30 Seminar session
      E-beams in semiconductor diagnostics and production
      (moderated by M. Mankos, R.Spehr, I. Müllerová, L. Frank)
16.00 Coffee break
16.30 Seminar session
      Poster session (moderated by P.Hawkes, H. Rose, G. Schönhense)
19.00 Open-air barbecue

Wednesday July 10


08.30 Breakfast
09.30 Seminar session
      Electron fundamentals (moderated by F. Hasselbach, P. Sonnentag, H. Wittels)
11.00 Coffee break
11.30 Seminar session
      Environmental SEM, cathodoluminescence in SEM
      (moderated by J. Jirák, V. Romanovský, P. Schauer)
13.00 Lunch
14.15 Departure by bus to an excursion with dinner in a rustic inn
21.00 Session with Moravian wine

Thursday July 11


08.30 Breakfast
09.30 Seminar session
      Correction of aberrations (moderated by H. Rose, F. Read, G. Schönhense)
11.00 Coffee break
11.30 Seminar session
      Future of design and use of the (low voltage) TEM (moderated by A. Delong, V. Kolařík)
13.00 Lunch
14.30 Seminar session
      Permanent magnet optics and non-traditional objective lenses for SEM
      (moderated by B. Lencová, A. Kursheed, A. Delong)
16.00 Coffee break
16.30 Seminar session
      Photoemission electron microscopy (moderated by G. Schönhense, M. Escher, G. Marx)
18:30 Concert of classical music (string quartet)
20.00 Farewell dinner

Friday July 12


08.30 Breakfast
09.30 Departure
POSTERS
Autrata R., Jirák J., Romanovský V., ©pinka J.:
	Combined detector for BSE SE and BSE+SE in low voltage SEM

Autrata R., Jirák J., ©pinka J.:
	X-ray microanalysis in ESEM

Autrata R., Schauer P.: Improvement of single crystal scintillator properties
	in SEM detectors.

Baranova L.A., Read F.H., Cubric D.:
	Computer simulation of a multipole aberration corrector 
	for a low-voltage scanning electron microscope.
	
Drnovský R.:
	Influence of primary electron energy on signal detected in ESEM

Dvořák D.:
	Misalignment aberrations

Escher M., Merkel M., Schönhese G.:
	Optimization of an electrostatic tetrode objective for XPEEM

Horáček M.:
	Acquisition of multi-dimensional image in the 
	scanning electron microscope

Jirák J., Autrata R., ©pinka J.:
	Detection of signal electrons at higher pressure in specimen chamber

Moonen D., Leunissen L.H.A., de Jager P.W.H., Bleecker A.J., van der Mast K.D.
	(presented by J. Barth): Design of an electron projection system with
	slider lenses and multiple beams

Müllerová I., Frank L.: An ultrahigh vacuum scanning low energy electron
	microscope for surface studies

Oral M.: Calculation of the beam profile

Rauscher M., Lutsch R.Y., Schubert S., Plies E.:
	Scanning unit with printed saddle coil for resolution 
	measurement in a miniaturised electrostatic lens system

Read F., Cubric D., Kumishiro S., Walker A.: 
	The parallel cylindrical mirror analyzer

Rensen M.J.M., van Aken R.H., Hagen C.W., Kruit P., Scanning transmission
	electron microscopy at sub-eV energy

Romanovský V., El-Gomati M.M., Frank L., Müllerová I.:
	Fully electrostatic low energy scanning electron column

Romanovský V., Neděla V., Hutař O.:
        Dispersion and detection of signal electrons in environmental SEM

Romanovský V., Neděla V., Autrata R.:
        Influence of the gas used on amplification of signals 
        in environmental SEM

Schneider L., Jirák J.:
	Influence of size of ionization detector electrode system 
	on signal detection in ESEM

Schubert S., Lutsch R.Y., Rauscher M., Winkler D., Plies E.:
	Design and simulation of a miniaturised electrostatic 
	column for high probe current

Schönhense G., Spiecker H.: Chromatic and spherical abberation correction using
	time - dependent acceleration and lens fields

©těpán P., Coufalová E.:
	Scanning modes in Low Voltage TEM

Zobačová J., Frank L., Müllerová I.:
	Specimen charging and detection of signal from non - conductors in a
	cathode lens equipped SEM
ORGANIZING COMMITTEE
Dr. Ilona Müllerová, Dr. Luděk Frank, Dr. Petr Schauer, Dr. Jitka Zobačová, Mgr. Petr Čiľmár