history of

13th International Seminar
on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Brno, Czech Republic, June 25 - 29, 2012

LIST OF PARTICIPANTS
Bok JanInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Cizmar PetrPhysikalisch-Technische Bundesanstalt, Braunschweig, Germany
Delong ArminDelong Instruments Ltd., Brno, Czech Republic
Dowsett DavidScientific Instrumentation Unit (UIS), Belvaux, Luxembourg
Dupák LiborInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Frank LuděkInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Grinfeld DmitryThermo Fisher, Bremen, Germany
Hoang Quang HungCentre de Recherche Public - Gabriel Lippmann, Belvaux, Luxembourg
Horáček MiroslavInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Janzen RolandKIT, Laboratory for Electron Microscopy, Karlsruhe, Germany
Jiruše JaroslavTESCAN a.s., Brno, Czech Republic
Khursheed AnjamNational University of Singapore, Singapore
Kolařík VladimírInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Lencová BohumilaTESCAN a.s., Brno, Czech Republic
Lopour FilipTESCAN a.s., Brno, Czech Republic
Mika FilipInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Mikmeková EliškaInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Müller HeikoCEOS GmbH, Heidelberg, Germany
Müllerová IlonaInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Mynář MartinDelong Instruments Ltd., Brno, Czech Republic
Oral MartinInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Panzer DanielInstitut für Physik, Univ. of Mainz, Mainz, Germany
Pokorná ZuzanaInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Preikszas DirkCarl Zeiss NTS GmbH, Oberkochen, Germany
Radlička TomášInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Ren YanTU-Delft, Delft, Netherlands
Rose HaraldUniversity of Ulm, Ulm, Germany
Seďa BohuslavFEI, Brno, Czech Republic
Schauer PetrInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
Schillinger RichardCarl Zeiss NTS GmbH, Oberkochen, Germany
Schönecker GeraldICT GmbH, Heimstetten, Germany
Schönhense GerdInstitut für Physik, Univ. of Mainz, Mainz, Germany
Srinivasan AvinashNational University of Singapore, Singapore
Urbánek MichalInstitute of Scientific Instruments ASCR, v.v.i. Brno, Czech Republic
Vašina RadovanFEI, Brno, Czech Republic
Vystavěl TomášFEI, Brno, Czech Republic
Winkler DieterICT GmbH, Heimstetten, Germany
Zemánek PavelInstitute of Scientific Instruments ASCR, v.v.i., Brno, Czech Republic
SCHEDULE

Monday June 25

 Arrival
20.00Welcome Party

Tuesday June 26

08.30Breakfast
09.30Seminar Session I: Electron Optical Computations I (chair: Rose Harald)
 Janzen Roland: Apertures with non Circular Holes - A Key to Aberration Correction in Multi Column / Miniaturized E-beam Systems?
 Radlicka Tomas: Calculation of Difraction Aberration using Differential Algebra
 Lencová Bohumila: Another Development in Electron Optical Design Program
11.00Coffee Break
11.30Seminar Session II: Electron Optical Computations II (chair: Lencová Bohumila)
 Ren Yan: Parallel Secondary Electron Detection in a Multi-beam SEM
 Müller Heiko: Practical Aspects of an Aplanatic Transmission Electron Microscope
 Rose Harald: Prospects and First Results of Sub-angstroem Low-voltage Electron Microscopy The SALVE Project
13.00Lunch
14.30Seminar Session III: Scintillation materials (chair: Frank Luděk)
 Schauer Petr: Current State and Prospects of Scintillation Materials for Detectors in SEM
 Bok Jan: Quality Assessment of Scintillation Detector in SEM using MTF
15.30Special guest:
 Pavel Zemánek: Classical and Advanced Methods of Optical Micromanipulations and Their Applications
16.00Coffee Break
16.15Seminar Session IV: Poster Presentation (chair: Mika Filip)
 Oral presentation of posters by authors in the lecture room, 5 - 7 min. each. A discussion and coffee will take place in front of the posters after the presentations (up to 17.00).
19.00 Open-Air Barbecue

Wednesday June 27

08.30Breakfast
09.30Seminar Session V: Image Contrast and Metrology (chair: Schönhense Gerd)
 Müllerová Ilona: Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope
 Cizmar Petr: Simulated SEM Images for 3D Reconstruction Assessment
 Kolařík Vladimír: What is the Buzz about the TZ Mode
11.00Coffee Break
11.15Seminar Session VI: Advanced Designs I (chair: Müller Heiko )
 Khursheed Anjam: Nano Emitter Ring Array Focused Electron Beam Columns
 Hoang Quang Hung: A Second-order Focusing Parallel Acquisition Radial Mirror Energy Analyser for the Scanning Electron / Ion Microscope
12.15Lunch
13.30Coach Trip and hike, followed by a dinner in a rustic inn

Thursday June 28

08.30Breakfast
09.30Seminar Session VII: Advanced Designs II (chair: Khursheed Anjam )
 Grinfeld Dmitry: Perturbation Theory and Space-charge Ion Dynamics in Orbitrap Mass Analyzer
 Oral Martin: Fast Simulation of ToF Spectrometers
 Dowsett David: Towards Secondary Ion Mass Spectrometry on the Helium Ion Microscope
11.00Coffee Break
11.30Seminar Session VIII: Advanced SEMs (chair: Müllerová Ilona)
 Frank Luděk: Surface Crystallinity at the Sight of Electrons
 Schönhense Gerd: Imaging Spin Filter for Electrons
 Pokorná Zuzana: Imaging the Local Density of Electronic States by Very Low Energy Electron Reflectivity
13.00Lunch
14.30Seminar Session XI: Electron Optical Aplications (chair: Ren Yan )
 Lencová Bohumila: LYRA 3 GM – a Versatile Multifunctional Tool
 Jiruše Jaroslav: Improving Resolution at Low Voltages in a Novel FE-SEM Column with Beam Deceleration Technology
15.30Coffee Break
16.00Seminar Session X: Discussion of Future Trends and Conclusions (chair: Mika Filip)
18.00Concert
19.30Farewell Dinner

Friday June 29

07.00Breakfast
 Departure
POSTERS

Posters:
Bok Jan:Measurements of Current Density Distribution in E-beam Writer
Dupák Libor:Electron Beam Cutting of Non-metals
Frank Luděk:Characterization of Industrial Materials by Slow and Very Slow Electrons
Horáček Miroslav:Thermal-field Electron Emission W(100)/ZrO Cathode: Facets Versus Edges
Kursheed Anjam:A Wide-range Parallel Magnetic Energy Analyzer for Scanning Electron Microscopes
Mikmeková Eliška:Observation of High Stressed Hydrogenated Carbon Nitride Films by SLEEM
Panzer Daniel:Development of a Thin-Film Spinfilter Optics for PEEM
Schillinger Richard:1003 The Libra 200 CsSTEM
Srinivasan Avinash:Detection of Surface Voltage Changes using a Second-order Focusing Toroidal Energy Analyzer SEM Attachment
Urbánek Michal:Proximity Effect Simulation for Variable Shape E-beam Writer
ORGANIZING COMMITTEE
Dr. Filip Mika